Structural behavior of rf magnetron sputtered cupric oxide (CuO) films
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چکیده
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Fabrication and Characteristics of RF Magnetron Sputtered ITO Thin Films
Indium tin oxide (ITO) films have been deposited onto glass substrates by ifmagnetron sputtering without insitu substrate heating. The as-deposited films have an electrical resistivity of 5x1O a-cm, visible transmittance of about 85%, and infrared (IR) reflectance of above 80% at 5 jim. The effect of sputtering parameters on the deposition rate and the electrical and optical properties of ITO f...
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ژورنال
عنوان ژورنال: Al-Qadisiyah Journal Of Pure Science
سال: 2020
ISSN: 2411-3514,1997-2490
DOI: 10.29350/qjps.2020.25.2.1082